Professor

Shoichi Kubodera

Profile

Specialized Field

Atomic, molecular, quantum electronics, plasma, applied optics, quantum optical engineering, electronic devices, electronic equipment

Research theme
  1. Development and application of high-intensity vacuum ultraviolet lasers
  2. Development of extreme ultraviolet light sources for next-generation semiconductor exposure equipment
  3. Rare gas excimer formation in high pressure rare gases
  4. Laser processing for fiber optic sensors
Subjects in charge

Basic optical properties, Introduction to laser science, International exchange theory, Seminar I and II

Specialized Field

Laser Engineering, Quantum Electronics

Subjects in charge

Laser Applications Engineering

Main career, work history, and academic background

Graduated from the Department of Electrical Engineering Faculty of Science and Engineering Keio University (March 1985)
Graduated from the Graduate School Graduate School of Science and Engineering, Keio University (March 1988) with a master's degree in Electrical Engineering.
Completed doctoral program at the Graduate School of Engineering, Rice University, USA (May 1991)
Special Research Fellow at the Laser Science Research Group of the Institute of Physical and Chemical Research (June 1991)
Assistant Lecturer Faculty of Engineering, University of Miyazaki (January 1994)
Assistant Lecturer, Center for Cooperative Research, University of Miyazaki (April 2000)
Professor, Faculty of Engineering, University of Miyazaki (March 2006)
Professor, Faculty of Science and Engineering, Soka University (April 2016)

Affiliated academic societies and organizations

Japan Society of Applied Physics
Laser Society of Japan
Institute of Electrical Engineers of Japan
Optical Society of America (OSA)
American Physical Society (APS)
Institute of Electrical and Electronics Engineers (IEEE) Photonics Society

Main Papers and Publications

Masanori Kaku, Masato Katto, Atsushi Yokotani, and Shoichi Kubodera, "Ultrashort pulse vacuum ultraviolet laser using an optical field ionization argon excimer amplifier", Laser Research, vol. 43, no. 8, pp. 537-541 (August 2015).
Masanori Kaku, Daichi Kai, Masahito Katto, Atsushi Yokotani, Shoichi Kubodera, and Wataru Sasaki, “Surface analysis by photo-stimulated desorption using tunable VUV radiation”, Appl. Phys. B, vol. 119, issue 3, pp. 427-433, (May 2015).
Masahito Katto, Masanori Kaku, Atsushi Yokotani, Kenzo Miyazaki, Noriaki Miyanaga, and Shoichi Kubodera, “Development of ultrashort pulsed VUV laser and its applications”, Journal of Laser Micro/Nanoengineering (JLMN), vol. 9, No. 2, pp. 108-112 (July 2014).
H. Daido, Y. Suzuki, T. Kawachi, T. Fukuda, T. Nakagiri, M. Kaku, and S. Kubodera, “Demonstration of partially transparent thick metallic sodium in the vacuum ultraviolet spectral range”, Opt. Exp. vol. 21, no. 23, pp. 28182-28188 (November 2013).
Yuta Matsuura, Masanori Kaku, and Shoichi Kubodera, “Enhancement of extreme ultraviolet radiations from a laser-produced plasma using copper-tungsten alloy”, Appl. Phys. B vol. 110, no. 3, pp. 397-400 (March 2013).
Masanori Kaku, Yuta Matsuura, Shoichi Kubodera, "Increase in Emission Intensity from Laser-Produced Plasma in the Extreme Ultraviolet Region Using Alloy Targets", Transactions of the Institute of Electrical Engineers of Japan, vol. 132, no. 8, Sec. C, pp. 1283-1286 (August 2012).
Masanori Kaku, Yusuke Sato, and Shoichi Kubodera, “Quasi-point incoherent ArF* excimer emission source at 193 nm using a laser-produced plasma”, Appl. Phys. B vol. 107, no. 1, pp. 85-89 (April 2012).
Masanori Kaku, Shinya Harano, Ryota Matsumoto, Masahito Katto, and Shoichi Kubodera, “Amplification properties of vacuum ultraviolet Ar2* produced by infrared high-intensity laser”, Opt. Lett. vol. 36, no. 14, pp. 2719-2721 (July 2011).
Masahito Katto, Hironari Zushi, Wataru Nagaya, Shinya Harano, Ryota Matsumoto, Atsushi Yokotani, Masanori Kaku, Shoichi Kubodera, and Noriaki Miyanaga, “Development of ultra-short pulse VUV laser system for nanoscale processing”, Appl. Phys. A vol. 101, no. 2, pp. 297-301 (November 2010).
Takashi Kurosawa, Akira Hosotani, Tadashi Ohmiya, Minoru Horikoshi, Masao Kanazawa, Masahito Katto Masanori Kaku, and Shoichi Kubodera, “Separation technique of raisins and stems utilizing characteristics of polarization”, Jpn. J. Appl. Phys. vol. 49, no. 9, pp. 098001-1-2 (September 2010).
Masahito Katto, Kazuyoshi Oda, Masanori Kaku, Atsushi Yokotani, Shoichi Kubodera, Noriaki Miyanaga, and Kunioki Mima, “Generation of subpicosecond vacuum ultraviolet pulses at 126 nm by using harmonics of a subpicosecond Ti:sapphire laser”, Opt. Commun. vol. 283, issue 3, pp. 414-416 (February 2010).